Siltronic offers a wide range of products on the market. Our technology in areas of crystal growing and thick epi allows us to tailor the products to our customers needs.
EPI
We offer a full range of epi reactor technologies to provide the appropriate solution for all technical requirements:
- From thin up to very thick epi
- Multiple layer epi
- Tight thickness tolerance
- Tight resistivity tolerance
- Transition profiles
- Nodule growth reduction
and a lot more
Our pancake, barrel, minibatch, and single wafer epi reactors can be optimally used for various sensitive applictions incl. IGBTs. The result is a more accurate epi profile and better resistivity and thickness capability.
OPTIMAL EDGE PROFILE
Asymmetric tailored edge shapes offer optimal edge profiles after backgrinding, where breakage is the biggest problem, improving end of line yield.